Chip-scale Lidar with enhanced range performance

ABSTRACT

A vehicle, Lidar system and method of detecting an object is disclosed. The Lidar system includes a photonic chip, and a laser integrated into the photonic chip. The laser has a front facet located at a first aperture of the photonic chip to direct a transmitted light beam into free space. A reflected light beam that is a reflection of the transmitted light beam is received at the photonic chip and a parameter of the object is determined from a comparison of the transmitted light beam and the reflected light beam. A navigation system operates the vehicle with respect to the object based on a parameter of the object.

CROSS REFERENCE TO RELATED APPLICATION

This application claims the benefit of U.S. Provisional Application Ser.No. 62/731,427 filed Sep. 14, 2018, the contents of which areincorporated by reference herein in its entirety.

INTRODUCTION

The subject disclosure relates to systems and methods for detecting anobject and, in particular, to a Lidar system and its use in detecting anobject.

A Lidar system for a vehicle can use a photonic chip with a laser. Thelaser light is transmitted from the photonic chip and reflected off ofan object. Differences between the transmitted light and the reflectedlight are used to determine various parameters of the object, such asits range, azimuth, elevation and velocity. In some photonic chips,light from the laser passes through an internal waveguide and an edgecoupler before exiting the photonic chip. Power losses at the internalwaveguide and edge coupler affect the detectable range of the Lidarsystem. Accordingly, it is desirable to provide a Lidar system thatgenerates a light beam without substantial power loss.

SUMMARY

In one exemplary embodiment, a method of detecting an object isdisclosed. The method includes generating a transmitted light beam at aphotonic chip via a laser at the photonic chip, the laser having a frontfacet located at a first aperture of the photonic chip to direct thetransmitted light beam into free space and into a region that includesthe object, receiving, at the photonic chip, a reflected light beam thatis a reflection of the transmitted light beam, and determining aparameter of the object from a comparison of the transmitted light beamand the reflected light beam.

In addition to one or more of the features described herein, the methodfurther includes receiving the reflected light beam at a second apertureof the photonic chip. The method further includes directing thetransmitted light beam in a selected direction via amicroelectromechanical (MEMS) scanner and receiving a reflected lightbeam from the selected direction via the MEMS scanner. The methodfurther includes directing the transmitted light beam from the firstaperture to the MEMS scanner via a free space circulator and directingthe reflected light beam from the MEMS scanner to the second aperturevia the free space circulator. The method further includes receiving aleakage energy from the laser as a local oscillator beam in the photonicchip. The reflected light beam and the local oscillator beam interferewith each other within the photonic chip. The method further includesnavigating a vehicle with respect to the object based on the parameterof the object.

In another exemplary embodiment, a Lidar system is disclosed. The Lidarsystem includes a photonic chip, and a laser integrated into thephotonic chip. The laser has a front facet located at a first apertureof the photonic chip to direct a transmitted light beam into free space.

In addition to one or more of the features described herein, thephotonic chip further includes a second aperture for receiving areflected beam that is a reflection of the transmitted beam from anobject in free space. The Lidar system further includes a processorconfigured to determine a parameter of the object from a comparison ofthe transmitted light beam and the reflected light beam. The Lidarsystem further includes a navigation system for operating a vehiclebased on the parameter of the object. The Lidar system further includesa microelectromechanical (MEMS) scanner for directing the transmittedlight beam in a selected direction and receiving a reflected light beamfrom the selected direction. The Lidar system further includes a freespace circulator configured to direct the transmitted light beam fromthe first aperture to a mirror of the MEMS scanner and to direct thereflected light beam from the mirror of the MEMS scanner to the secondaperture. A leakage energy from the laser is provided as a localoscillator beam in the photonic chip.

In yet another exemplary embodiment, a vehicle is disclosed. The vehicleincludes a Lidar system for determining a parameter of an object and anavigation system. The Lidar system includes a photonic chip and a laserintegrated into the photonic chip. The laser has a front facet locatedat a first aperture of the photonic chip to direct a transmitted lightbeam into free space including the object. The navigation system isconfigured to operate the vehicle with respect to the object based on aparameter of the object determined from the transmitted light beam.

In addition to one or more of the features described herein, thephotonic chip further includes a second aperture for receiving areflected beam that is a reflection of the transmitted beam from anobject in free space. A processor determines the parameter of the objectfrom a comparison between the transmitted light beam and the reflectedlight beam. The Lidar system further includes a microelectromechanical(MEMS) scanner for directing the transmitted light beam in a selecteddirection and receiving a reflected light beam from the selecteddirection. A free space circulator directs the transmitted light beamfrom the first aperture to a mirror of the MEMS scanner and to directthe reflected light beam from the mirror of the MEMS scanner to thesecond aperture. A leakage energy from the laser is provided as a localoscillator beam in the photonic chip.

The above features and advantages, and other features and advantages ofthe disclosure are readily apparent from the following detaileddescription when taken in connection with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

Other features, advantages and details appear, by way of example only,in the following detailed description, the detailed descriptionreferring to the drawings in which:

FIG. 1 shows a plan view of a vehicle suitable for use with a Lidarsystem;

FIG. 2 shows a detailed illustration of an exemplary Lidar systemsuitable for use with the vehicle of FIG. 1 ;

FIG. 3 shows a side view of the Lidar system of FIG. 2 ;

FIG. 4 shows an alternative photonic chip that can be used with theLidar system in place of the photonic chip of FIG. 2 ;

FIG. 5 shows another alternative photonic chip that can be used in placeof the photonic chip of FIG. 2 ;

FIG. 6 shows a tapered Distributed Bragg Reflection (DBR) Laser Diode;

FIG. 7 shows details of a Master Oscillator Power Amplifier (MOPA) in anembodiment;

FIG. 8 shows an optical frequency shifter using an Integrated Dual I&QMach-Zehnder Modulator (MZM);

FIG. 9 shows an optical frequency shifter in an alternate embodiment;

FIG. 10 shows an alternate configuration of free space optics and a MEMSscanner for use with the Lidar system of FIG. 2 ; and

FIG. 11 shows an alternate configuration of free space optics and a MEMSscanner for use with the Lidar system of FIG. 2 .

DETAILED DESCRIPTION

The following description is merely exemplary in nature and is notintended to limit the present disclosure, its application or uses. Itshould be understood that throughout the drawings, correspondingreference numerals indicate like or corresponding parts and features.

In accordance with an exemplary embodiment, FIG. 1 shows a plan view ofa vehicle 100 suitable for use with a Lidar system 200 of FIG. 2 . TheLidar system 200 generates a transmitted light beam 102 that istransmitted toward an object 110. The object 110 can be any objectexternal to the vehicle 100, such as another vehicle, a pedestrian, atelephone pole, etc. Reflected light beam 104, which is due tointeraction of the object 110 and the transmitted light beam 102, isreceived back at the Lidar system 200. A processor 106 controls variousoperation of the Lidar system 200 such as controlling a light source ofthe Lidar system 200, etc. The processor 106 further receives data fromthe Lidar system 200 related to the differences between the transmittedlight beam 102 and the reflected light beam 104 and determines variousparameters of the object 110 from this data. The various parameters caninclude a distance or range of the object 110, azimuth location,elevation, Doppler (velocity) of the object, etc. The vehicle 100 mayfurther include a navigation system 108 that uses these parameters tonavigate the vehicle 100 with respect to the object 110 for the purposesof avoiding contact with the object 110. While discussed with respect tovehicle 100, the Lidar system 200 can be used with other devices invarious embodiments, including chassis control systems and forward orpre-conditioning vehicle for rough roads.

FIG. 2 shows a detailed illustration of an exemplary Lidar system 200suitable for use with the vehicle of FIG. 1 . The Lidar system 200includes an integration platform 240, which can be a Silicon platform,and various affixed components. A photonic chip 202, free space optics204 and a microelectromechanical (MEMS) scanner 206 are disposed on theintegration platform 240.

In various embodiments, the photonic chip 202 is part of a scanningfrequency modulated continuous wave (FMCW) Lidar. The photonic chip 202can be a silicon photonic chip in various embodiments. The photonic chip202 can include a light source, a waveguide and at least onephotodetector. In one embodiment, the photonic chip 202 includes a lightsource, such as a laser 210, a first waveguide 212 (also referred toherein as a local oscillator waveguide), a second waveguide 214 (alsoreferred to herein as a return signal waveguide) and a set ofphotodetectors 216 a and 216 b. The photonic chip 202 further includesone or more edge couplers 218, 220 for controlling input of light intoassociated waveguides. The edge couplers can be spot size converters,gratings or any other suitable device for transitioning light betweenfree space propagation and propagation within a waveguide. At a selectedlocation, the first waveguide 212 and the second waveguide 214 approacheach other to form a multi-mode interference (MMI) coupler 226.

The laser 210 is an integrated component of the photonic chip 202. Thelaser 210 can be any single frequency laser that can be frequencymodulated and can generate light at a selected wavelength such as awavelength that is considered safe to human eyes (e.g., 1550 nanometers(nm)). The laser 210 includes a front facet 210 a and a back facet 210b. A majority of the energy from the laser 210 is transmitted into freespace via the front facet 210 a and a first aperture 222 (transmissionaperture) of the photonic chip 202. A relatively small percentage ofenergy from the laser, also referred to as leakage energy, exits thelaser 210 via the back facet 210 b and is directed into the firstwaveguide 212.

The leakage energy used as the local oscillator beam can be varying,therefore affecting measurements related to the parameter of the object110. In order to control power of the local oscillator beam, a variableattenuator can be used in the optical path of the local oscillatorwaveguide. When the power of the local oscillator beam exceeds aselected power threshold, the attenuator can be activated to limit thepower local oscillator beam. Alternatively, a control voltage can beused at the laser 210 in order to control the gain of the laser 210 atthe back facet 210 b of the laser. The control voltage can be used toeither increase or decrease the radiation or leakage energy at the backfacet 210 b.

The first waveguide 212 provides an optical path between the back facet210 b of laser 210 and the photodetectors 216 a, 216 b. An end of thefirst waveguide 212 is coupled to the back facet 210 b of the laser 210via first edge coupler 218. Leakage energy from the back facet 210 b isdirected into the first waveguide 212 via the first edge coupler 218.

The second waveguide 214 provides an optical path between a secondaperture 224, also referred to as a receiver aperture, of the photonicchip 202 and the photodetectors 216 a, 216 b. The second edge coupler220 at the second aperture 224 focuses the incoming reflected light beam104 into the second waveguide 214.

The first waveguide 212 and second waveguide 214 form a multimodeinterference (MMI) coupler 226 at a location between their respectiveapertures (222, 224) and the photodetectors (216 a, 216 b). Light in thefirst waveguide 212 and light in the second waveguide 214 interfere witheach other at the MMI coupler 226 and the results of the interferenceare detected at photodetectors 216 a and 216 b. Measurements at thephotodetectors 216 a and 216 b are provided to the processor 106, FIG. 1, which determines various characteristics of the reflected light beam104 and thus various parameters of the object 110, FIG. 1 . Thephotodetectors 216 a and 216 b convert the light signal (i.e., photons)to an electrical signal (i.e., electrons). The electrical signalgenerally requires additional signal processing such as amplification,conversion from an electrical current signal to an electrical voltagesignal, and conversion from an analog signal into a discrete digitalsignal prior to be provided to the processor 106.

The free space optics 204 includes a collimating lens 228 a focusinglens 230, an optical circulator 232 and a turning mirror 234. Thecollimating lens 228 changes the curvature of the transmitted light beam102 from a divergent beam (upon exiting the front facet 210 a of laser210 b to a collimated or parallel beam of light. The optical circulator232 controls a direction of the transmitted light beam 102 and of thereflected light beam 104. The optical circulator 232 directs thetransmitted light beam 102 forward without any angular deviation anddirects the incoming or reflected light beam 104 by a selected angle. Invarious embodiments, the selected angle is a 90 degree angle, but anysuitable angle can be achieved. The reflected light beam 104 is directedtoward the focusing lens 230 at turning mirror 234. The focusing lens230 changes the curves of the reflected light beam 104 from asubstantially parallel beam of light to a converging beam of light. Thefocusing lens 230 is placed at a distance from second aperture 224 thatallows concentration of the reflected light beam 104 onto the secondedge coupler 220 at the second aperture 224.

The MEMS scanner 206 includes a mirror 236 for scanning the transmittedlight beam 102 over a plurality of angles. In various embodiments, themirror 236 is able to rotate along two axes, thereby scanning thetransmitted light beam 102 over a selected area. In various embodiments,the mirror axes include a fast axis having a scan angle of about 50degrees and a quasi-static slow axis having a scan angle of about 20degrees. The MEMS scanner 206 can direct the transmitted light beam in aselected direction and receives a reflected light beam 104 from theselected direction.

FIG. 3 shows a side view of the Lidar system 200 of FIG. 2 . Theintegration platform 240 includes the photonic chip 202 disposed on asurface of the integration platform 240. The integration platform 240includes a pocket 242 into which an optical submount 244 can bedisposed. The free space optics 204 and the MEMS scanner 206 can bemounted on the optical submount 244 and the optical submount can bealigned within pocket 242 in order to align the collimating lens 228with the first aperture 222 of the photonic chip 202 and align thefocusing lens 230 with the second aperture 224 of the photonic chip. Theoptical submount 244 can be made of a material that has a coefficient ofthermal expansion that matches or substantially matches the coefficientof thermal expansion of the integration platform 240, in order tomaintain the alignment between the free space optics 204 and thephotonic chip 202. The integration platform 240 can be coupled to aprinted circuit board 246. The printed circuit board 246 includesvarious electronics for operation of the components of the Lidar system200, including controlling operation of the laser 210, FIG. 2 of thephotonic chip 202, controlling oscillations of the mirror 236, receivingsignals from the photodetectors 216 a and 216 b and processing thesignals in order to determine various characteristics of the reflectedlight beam 104 and thereby determine various parameters of object 110,FIG. 1 associated with the reflected light beam.

The use of an optical submount 244 is one possible implementation for anembodiment of the integration platform 240. In another embodiment, anoptical submount 244 is not used and the free space optics 204 and MEMSmirror 236 are disposed directly on the integration platform 240.

FIG. 4 shows an alternative photonic chip 400 that can be used with theLidar system 200 in place of the photonic chip 202 of FIG. 2 . Invarious embodiments, the photonic chip 400 is part of a scanningfrequency modulated continuous wave (FMCW) Lidar and can be a siliconphotonic chip. The photonic chip 400 includes a coherent light sourcesuch as a laser 210 that is an integrated component of the photonic chip400. The laser 210 can be any single frequency laser that can befrequency modulated. In various embodiments, the laser 210 generateslight at a selected wavelength, such as a wavelength considered safe tohuman eyes (e.g., 1550 nanometers (nm)). The laser includes a frontfacet 210 a out of which a majority of the laser energy exits from thelaser 210 and a back facet 210 b out of which a leakage energy exits.The energy which leaks out the back facet 210 b can be coupled to aphotodetector (not shown) for the purposes of monitoring the performanceof the laser 210. The front facet 210 a of laser 210 is coupled to atransmitter waveguide 404 via a laser-faced edge coupler 406 thatreceives the light from the laser 210. The transmitter waveguide 404directs the light from the front facet 210 a of laser 210 out of thephotonic chip 400 via a transmission edge coupler 420 as transmittedlight beam 102.

A local oscillator (LO) waveguide 408 is optically coupled to thetransmitter waveguide 404 via a directional coupler/splitter or amulti-mode interference (MMI) coupler/splitter 410 located between thelaser 210 and the transmission edge coupler 420. The directional or MMIcoupler/splitter 410 splits the light from the laser 210 into thetransmitted light beam 102 that continues to propagate in thetransmitter waveguide 404 and a local oscillator beam that propagates inthe local oscillator waveguide 408. In various embodiments, a splittingratio can be 90% for the transmitted light beam 102 and 10% for thelocal oscillator beam. The power of a local oscillator beam in the localoscillator waveguide 408 can be controlled by use of a variableattenuator in the LO waveguide 408 or by use of a control voltage at thelaser 210. The local oscillator beam is directed toward dual-balancedphotodetectors 216 a, 216 b that perform beam measurements and convertthe light signals to electrical signals for processing.

Incoming or reflected light beam 104 enters the photonic chip 400 viareceiver waveguide 414 via a receiver edge coupler 422. The receiverwaveguide 414 directs the reflected light beam 104 from the receiveredge coupler 422 towards the dual-balanced photodetector 216 a, 216 b.The receiver waveguide 414 is optically coupled to the local oscillatorwaveguide 408 at a directional or MMI coupler/combiner 412 locatedbetween the receiver edge coupler 422 and the photodetectors 216 a, 216b. The local oscillator beam and the reflected light beam 104 interactwith each other at the directional or MMI coupler/combiner 412 beforebeing received at the dual-balanced photodetector 216 a, 216 b. Invarious embodiments, the transmitter waveguide 404, local oscillatorwaveguide 408 and receiver waveguide 414 are optical fibers.

FIG. 5 shows another alternative photonic chip 500 that can be used inplace of the photonic chip 202 of FIG. 2 . The alternative photonic chip500 has a design in which the laser 210 is not integrated onto thephotonic chip 500. The photonic chip 500 includes a first waveguide 502for propagation of a local oscillator beam within the photonic chip 500and a second waveguide 504 for propagation of a reflected light beam 104within the photonic chip 500. One end of the first waveguide 502 iscoupled to a first edge coupler 506 located at a first aperture 508 ofthe photonic chip 500 and the first waveguide 502 directs the signaltowards photodetectors 216 a and 216 b. One end of the second waveguide504 is coupled to a second edge coupler 510 located at a second aperture512 and the second waveguide 504 directs the signal towardsphotodetectors 216 a, 216 b. The first waveguide 502 and the secondwaveguide 504 approach each other at a location between their respectiveedge couplers 506, 510 and the photodetectors 216 a, 216 b to form anMMI coupler 514 in which the local oscillator beam and the reflectedlight beam 104 interfere with each other.

The laser 210 is off-chip (i.e., not integrated into the photonic chip500) and is oriented with its back facet 210 b directed towards thefirst edge coupler 506. The laser 210 can be any single frequency laserthat can be frequency modulated. In various embodiments, the laser 210generates light at a selected wavelength, such as a wavelengthconsidered safe to human eyes (e.g., 1550 nanometers (nm)). A focusinglens 520 is disposed between the back facet 210 b and the first aperture508 and focuses the leakage beam from the back facet 210 b onto thefirst edge coupler 506 so that the leakage beam enters the firstwaveguide 502 to serve as the local oscillator beam. The power of alocal oscillator beam in the first waveguide 502 can be controlled byuse of a variable attenuator in the first waveguide 502 or by use of acontrol voltage at the laser 210. Light exiting the laser 210 via thefront facet 210 a is used as the transmitted light beam 102 and isdirected over a field of view of free space in order to be reflected offof an object 110, FIG. 1 within the field of view. The reflected lightbeam 104 is received at the second edge coupler 510 via suitable freespace optics (not shown).

FIG. 6 shows a tapered Distributed Bragg Reflection (DBR) Laser Diode600. The DBR Laser Diode 600 can be used as the laser 210 for thephotonic chips 202, 400 and 500 of the Lidar system 200. The DBR LaserDiode 600 includes a highly reflective DBR back mirror 602 at a backfacet 610 b of the DBR Laser Diode, a less reflective front mirror 606at a front facet 610 a of the DBR Laser Diode and a tapered gain section604 between the DBR back mirror 602 and the front mirror 606. The DBRback mirror 602 includes alternating regions of materials with differentindices of refraction. Current or energy can be applied at the taperedgain section 604 to generate light at a selected wavelength.

FIG. 7 shows details of a Master Oscillator Power Amplifier (MOPA) 700in an embodiment. The MOPA 700 can be used as the laser 210 for thephotonic chips 202, 400 and 500 of the Lidar system 200.

The MOPA 700 includes a highly reflective DBR back mirror 702 located ata back facet 710 b and a less reflective DBR front mirror 708 near thefront facet 710 a. A phase section 704 and a gain section 706 arelocated between the back mirror 702 and the front mirror 708. The phasesection 704 adjusts the modes of the laser and the gain section 706includes a gain medium for generating light at a selected wavelength.The light exiting the front mirror 708 passes through an amplifiersection 710 that increases light intensity.

In various embodiments, the laser has a front facet output power of 300milliWatts (mW) and has a back facet output power of about 3 mW, whilemaintaining a linewidth of less than about 100 kilohertz (kHz). The MOPA700, while having a more complicated design than the DBR Laser Diode600, is often more dependable in producing the required optical power atthe front facet while maintaining single-frequency operation andsingle-spatial mode operation.

FIG. 8 shows an optical frequency shifter 800 using an Integrated DualI&Q Mach-Zehnder Modulator (MZM) 804. The optical frequency shifter 800can be used to alter a frequency or wavelength of a local oscillatorbeam in order to reduce ambiguity in measurements of the reflected lightbeam 104. The optical frequency shifter 800 includes an input waveguide802 providing light at a first wavelength/frequency, also referred toherein as a diode wavelength/frequency (λ_(D)/f_(D)), to the MZM 804.The optical frequency shifter 800 further includes an output waveguide806 that receives light at a shifted wavelength/frequency(λ_(D)−λ_(m)/f_(D)+f_(m)) from the MZM 804. The λ_(m) and f_(m) are thewavelength shift and frequency shift, respectively, imparted to thelight by the MZM 804.

At the MZM 804, the light from the input waveguide 802 is split intoseveral branches. In various embodiments, there are four branches to theMZM 804. Each branch includes an optical path shifter 808 that can beused to increase or decrease the length of the optical path and hencechange the phase delay along the selected branch. A selected opticalpath shifter 808 can be a heating element that heats the branch in orderto increase or decrease the length of the branch due to thermalexpansion or contraction. A voltage can be applied to control theoptical path shifter 808 and therefore to control the increase ofdecrease of the length of the optical path. Thus, an operator orprocessor can control the value of the change in wavelength/frequency(λ_(m)/f_(m)) and thus the shifted wavelength/frequency(λ_(D)−λ_(m)/f_(D)+f_(m)) in the output waveguide 806.

FIG. 9 shows an optical frequency shifter 900 in an alternateembodiment. The optical frequency shifter 900 includes a singleMach-Zehnder Modulator (MZM) 904 and a High-Q Ring Resonator OpticalFilter 908. The single MZM 904 has two branches of waveguides, eachbranch having an optical path shifter 910. An input waveguide 902directs light into the single MZM 904 with an operatingwavelength/frequency (λ_(D)/f_(D)), where the light is split among thebranches of the single MZM 904. The optical path shifters 910 areactivated to impart a change in frequency/wavelength (λ_(m)/f_(m)) tothe light. Light from the MZM 904 passes through the optical filter 908via output waveguide 906 in order to reduce harmonics generated by thesingle MZM 904. In various embodiments, light exiting via the opticalfilter 908 has wavelength/frequency (λ_(D)−λ_(m)/f_(D)+f_(m)).

In various embodiments, the optical frequency shifter (800, 900) shiftsthe optical frequency of the local oscillator beam by up to about 115Megahertz (Mhz). The Integrated Dual I&Q MZM 804 is able to achieve awide range of optical shifting, such as by an amount greater than 1Gigahertz (GHz) while generating only a low level of harmonics (i.e.,<−20 dB). Often, the Integrated Dual I&Q MZM 804 is selected over theIntegrated Single MZM and High-Q Ring Resonator Optical Filter 908,although its design is more complex.

FIG. 10 shows an alternate configuration 1000 of free space optics 204and MEMS scanner 206 for use with the Lidar system 200, FIG. 2 . Thefree space optics includes the collimating lens 228, focusing lens 230,optical circulator 232 and turning mirror 234 as shown in FIG. 2 . Thefree space optics further includes a turning mirror 1002 that directsthe transmitted light beam 102 from the optical circulator 232 onto themirror 236 of the MEMS scanner 206 and directs the reflected light beam104 from the mirror 236 of the MEMS scanner 206 to the opticalcirculator 232. The turning mirror can deflect the light out of theplane of the free space optics and can include a plurality of turningmirrors in various embodiments.

FIG. 11 shows an alternate configuration 1100 of free space optics 204and MEMS scanner 206 for use with the Lidar system 200, FIG. 2 . Thefree space optics includes a single collimating and focusing lens 1102,a birefringent wedge 1104, a Faraday rotator 1106 and a turning mirror1108. The collimating and focusing lens 1102 collimates the transmittedlight beam 102 traveling in one direction and focuses the reflectedlight beam 104 traveling in the opposite direction. The birefringentwedge 1104 alters a path of a light beam depending on a polarizationdirection of the light beam. The Faraday rotator 1106 affects thepolarization directions of the light beams. Due to the configuration ofthe birefringent wedge 1104 and the Faraday rotator 1106, thetransmitted light beam 102 is incident on the birefringent wedge 1104with a first polarization direction and the reflected light beam 104 isincident on the birefringent wedge 1104 with a second polarizationdirection that is different from the first polarization direction,generally by a 90 degree rotation of the first polarization direction.Thus the transmitted light beam 102 can exit the photonic chip at afirst aperture 1110 and be deviated to travel along selected directionat mirror 236 of MEMS scanner 206. Meanwhile the reflected light beam104, travelling in the opposite direction as the transmitted light beam102 at the MEMS scanner 206, is deviated onto another direction that isdirected towards a second aperture 1112 of the photonic chip.

A turning mirror 1108 directs the transmitted light beam 102 from theFaraday rotator 1106 onto the mirror 236 of the MEMS scanner 206 anddirects the reflected light beam 104 from the mirror 236 of the MEMSscanner 206 to the Faraday rotator 1106. The turning mirror 1008 candeflect the light out of the plane of the free space optics and caninclude a plurality of turning mirrors in various embodiments.

While the above disclosure has been described with reference toexemplary embodiments, it will be understood by those skilled in the artthat various changes may be made and equivalents may be substituted forelements thereof without departing from its scope. In addition, manymodifications may be made to adapt a particular situation or material tothe teachings of the disclosure without departing from the essentialscope thereof. Therefore, it is intended that the present disclosure notbe limited to the particular embodiments disclosed, but will include allembodiments falling within the scope thereof.

What is claimed is:
 1. A method of detecting an object, comprising:generating a transmitted light beam at a photonic chip via a laser atthe photonic chip, the laser having a front facet located at a firstaperture of the photonic chip to direct the transmitted light beam intofree space and into a region that includes the object; directing thetransmitted light beam in a selected direction via amicroelectromechanical (MEMS) scanner; receiving a reflected light beamfrom the selected direction at the MEMS scanner, wherein the reflectedlight beam is a reflection of the transmitted light beam; receiving, thereflected light beam from the MEMS scanner at a second aperture of thephotonic chip; and determining a parameter of the object from acomparison of the transmitted light beam and the reflected light beam.2. The method of claim 1, further comprising directing the transmittedlight beam from the first aperture to the MEMS scanner via a free spacecirculator and directing the reflected light beam from the MEMS scannerto the second aperture via the free space circulator.
 3. The method ofclaim 1, further comprising receiving a leakage energy from the laser asa local oscillator beam in the photonic chip.
 4. The method of claim 3,wherein the reflected light beam and the local oscillator beam interferewith each other within the photonic chip.
 5. The method of claim 1,further comprising navigating a vehicle with respect to the object basedon the parameter of the object.
 6. A Lidar system, comprising: aphotonic chip having a first aperture and a second aperture; a laserintegrated into the photonic chip, the laser having a front facetlocated at the first aperture of the photonic chip to direct atransmitted light beam into free space; and a microelectromechanical(MEMS) scanner for directing the transmitted light beam from the firstaperture in a selected direction, receiving a reflected light beam fromthe selected direction and directing the reflected light beam to thesecond aperture, wherein the reflected light beam is a reflection of thetransmitted beam from an object in free space.
 7. The Lidar system ofclaim 6, further comprising a processor configured to determine aparameter of the object from a comparison of the transmitted light beamand the reflected light beam.
 8. The Lidar system of claim 7, furthercomprising a navigation system for operating a vehicle based on theparameter of the object.
 9. The Lidar system of claim 6, furthercomprising a free space circulator configured to direct the transmittedlight beam from the first aperture to a mirror of the MEMS scanner andto direct the reflected light beam from the mirror of the MEMS scannerto the second aperture.
 10. The Lidar system of claim 6, wherein aleakage energy from the laser is provided as a local oscillator beam inthe photonic chip.
 11. A vehicle, comprising: a Lidar system fordetermining a parameter of an object, the Lidar system including: aphotonic chip having a first aperture and a second aperture; a laserintegrated into the photonic chip, the laser having a front facetlocated at the first aperture of the photonic chip to direct atransmitted light beam into free space including the object; amicroelectromechanical (MEMS) scanner for directing the transmittedlight beam in a selected direction, receiving a reflected light beamfrom the selected direction and directing the reflected light beam tothe second aperture, wherein the reflected light beam is a reflection ofthe transmitted beam from the object; and a navigation system foroperating the vehicle with respect to the object based on the parameterof the object determined from the transmitted light beam.
 12. Thevehicle of claim 11, further comprising a processor configured todetermine the parameter of the object from a comparison between thetransmitted light beam and the reflected light beam.
 13. The vehicle ofclaim 11, further comprising a free space circulator configured todirect the transmitted light beam from the first aperture to a mirror ofthe MEMS scanner and to direct the reflected light beam from the mirrorof the MEMS scanner to the second aperture.
 14. The vehicle of claim 11,wherein a leakage energy from the laser is provided as a localoscillator beam in the photonic chip.